Eecs phd dissertation

A study by the College of Nanoscale Science and Engineering (CNSE) presented at the 2013 EUVL Workshop indicated that, as a measure of EUV photoelectron and secondary electron blur, 50–100 eV electrons easily penetrated beyond 15 nm of resist thickness (PMMA or commercial resist), indicating more than 30 nm range of resist affected centered on the EUV point of absorption, for doses exceeding 200–300 uC/cm 2 . [68] This can be compared with the image contrast degradation reported for sub-40 nm pitches later in 2015. [69]

Eecs phd dissertation

eecs phd dissertation

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